Development of a Probe System for Measuring the Plasma Parameters and the High-Energy Part of the Electron-Energy Distribution Function

Abstract— A probe system has been developed on the basis of an external ADC/DAC module (ADC is analog-to-digital converter and DAC digital-to-analog converter). Using this system, it possible to determine all main plasma parameters continuous pulsed gas discharges. program for Windows operating in C++ control system. The can be used diagnostics devices included modern microplasma analyzers mixtures.